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Equipment Model:
AR_PR1FS
AR_PR1BS
AR_PR2FS
AR_PR2BS
──────────
AR_S1PR3
AR_SCR5
AR_SCR4
──────────
IMP_Pilot
IMP_Beta
-- Preset --
Load
Del
Save
LP (Loadport,FOUP)
Total Wafers:
Number of LPs:
1
2
3
4
LP Exchange Time[s]:
IDR (Index Robot) [s]
Move:
Get:
Put:
Exch:
PR (Process Robot) [s]
Move:
Get:
Put:
Exchange:
Shuttle (Sec)
Short Move:
Long Move:
Get:
Put:
Rotate:
Buffer (Sec)
Buf_S Up/Down:
Buf_B/C Up/Down:
Chamber (Sec)
Process:
Options
Chambers:
24 (8ch/PR)
18 (Fill Skip)
Buf_A Slots:
10 slot
20 slot
PRb/c Hands:
1+1
1+1+1+1
LP Return Origin
Shuttle Pre-pos
WPH 1:1:1
LP (Loadport,FOUP)
Num Wafers:
Foup Change(s):
IDR (Index Robot) [s]
Get:
Put:
Move:
Exch:
LL (Loadlock) [s]
Pump:
PumpLock
Vent:
VentLock
VTR Robot (Sec)
Get:
Put:
Rot:
Exchange:
Z Move in LL:
Align(or Vision):
ISR (IMP Scan Robot) [s]
ISR MoveToExchange:
ISR Declamping:
ISR Clamping:
ISR MoveToStandby:
ISR Scanning:
Options
Shared ISR exchange
VTR Hands:
2
1
VTR:
Dual VTR, Dual ISR
Dual VTR, Single ISR
Single VTR, Dual ISR
Single VTR, Single ISR
Loadlock:
1000 (LL_a0)
1100 (LL_a0,LL_a1)
1010 (LL_a0,LL_b0)
1110 (LL_a0,LL_a1,LL_b0)
1111 (ALL)
Aligner:
Single
Dual
Vision
LP Return Origin
LP (Loadport,FOUP)
Num Wafers:
Foup Change(s):
IDR (Index Robot) [s]
Get:
Put:
Move:
Exch:
Loadlock (Sec) — 25 slot
Pump:
PumpLock
Vent:
VentLock
VTR Robot (Sec)
Get:
Put:
Rot:
Exchange:
Z Move in LL:
Align(or Vision):
ISR (IMP Scan Robot) [s]
ISR MoveToExchange:
ISR Declamping:
ISR Clamping:
ISR MoveToStandby:
ISR Scanning:
Options
Share Loadlock
Shared ISR exchange
VTR Hands:
2
1
VTR:
Dual VTR, Dual ISR
Dual VTR, Single ISR
Single VTR, Dual ISR
Single VTR, Single ISR
Loadlock:
10 (LL0 only)
11 (ALL)
Aligner:
Single
Dual
Vision
LP Return Origin
LP (Loadport,FOUP)
Total Wafers:
Number of LPs:
1
2
3
4
LP Exchange Time[s]:
IDR (Index Robot) [s]
Move:
Get:
Put:
Exch:
PR (Process Robot) [s]
Move:
Get:
Put:
Exchange:
Buffer (Sec)
Buf_U Up/Down:
Flip:
Chamber
Process [sec]:
Process Steps:
1 (single)
2 (P1 → P2)
3 (P1 → P2 → P3)
PRb/PRa 각자 6 chambers 독립
Options
Buf Slots (B0~B3):
4 slots
8 slots
PR Arms:
1+1
1+1+1+1
LP Slots:
25 slots
13 slots
High-Bow:
IDR batch
IDR 1by1
LP Return Origin
LP (Loadport,FOUP)
Total Wafers:
Number of LPs:
1
2
3
4
LP Exchange Time[s]:
IDR (Index Robot) [s]
Move:
Get:
Put:
Exch:
PR (Process Robot) [s]
Move:
Get:
Put:
Exchange:
Buffer (Sec)
B2/B3 Up/Down:
Chamber
Process [sec]:
Process Steps:
1 (single)
2 (P1 → P2)
3 (P1 → P2 → P3)
PRb/PRa 각자 6 chambers 독립
Options
Buf Slots (B0~B3):
4 slots
8 slots
12 slots
PR Arms:
1+1
1+1+1+1
IDR Arms:
1+1+1+1
1+2+1+2
LP Slots:
25 slots
13 slots
High-Bow:
IDR batch
IDR 1by1
LP Return Origin
LP (Loadport,FOUP)
Total Wafers:
Number of LPs:
1
2
3
4
LP Exchange Time[s]:
IDR (Index Robot) [s]
Move:
Get:
Put:
Exch:
PR (Process Robot) [s]
Move:
Get:
Put:
Exchange:
Buffer (Sec)
Flip:
Chamber
Process [sec]:
Total Chambers:
Process Steps:
1 (single)
2 (P1 → P2)
3 (P1 → P2 → P3)
Options
Buf Slots:
B0+B1 4 Slots
B0 4 Slots
PR Arms:
1+1
1+1+1+1
IDR Arms:
1+1
1+1+1+1
LP Slots:
25 slots
13 slots
High-Bow:
IDR batch
IDR 1by1
LP Return Origin
LP (Loadport,FOUP)
Total Wafers:
Number of LPs:
1
2
3
4
LP Exchange Time[s]:
IDR (Index Robot) [s]
Move:
Get:
Put:
Exch:
PR (Process Robot) [s]
Move:
Get:
Put:
Exchange:
Chamber
Process [sec]:
Total Chambers:
Process Steps:
1 (single)
2 (P1 → P2)
3 (P1 → P2 → P3)
Options
Buf Slots:
B0+B1 4 Slots
B0+B1 6 Slots
B0 4 Slots
B0 6 Slots
PR Arms:
1+1
1+1+1+1
IDR Arms:
1+1
1+1+1+1
LP Slots:
25 slots
13 slots
High-Bow:
IDR batch
IDR 1by1
LP Return Origin
LP (Loadport,FOUP)
Total Wafers:
Wafers per LP:
Number of LPs:
1
2
3
4
LP Exchange Time[s]:
IDR (Index Robot) [s]
Move:
Get:
Put:
Exch:
PR (Process Robot) [s]
Move:
Get:
Put:
Exchange:
BufR Flip (Sec)
Flip:
Chamber (Sec)
Process:
Options
Cleaning Mode:
FrontSide
BackSide
BothSide (미구현)
Chambers:
8 (U1~U4 + D1~D4)
6 (U1~U3 + D1~D3)
4 (U1~U2 + D1~D2)
IDR Hands:
Batch 2+2 (RRDD)
Batch 4 (AAAA)
PR Arms:
1+1
1+1+1+1
LP Return Origin
LP (Loadport,FOUP)
Total Wafers:
Number of LPs:
1
2
3
4
Wafers per LP:
LP Exchange Time[s]:
Index Robot (Sec) — 1 Arm 5장
Move:
Get:
Put:
Exch:
PR (Process Robot) [s]
Move:
Get:
Put:
Exchange:
BufR Flip (Sec)
Flip:
Chamber (Sec)
Process:
Options
Cleaning Mode:
FrontSide
BackSide
BothSide (미구현)
Chambers:
8 (U1~U4 + D1~D4)
6 (U1~U3 + D1~D3)
4 (U1~U2 + D1~D2)
PR Arms:
1+1
1+1+1+1
LP Return Origin
Tick:
0.1s
0.01s
Apply & Run
Stop
⏸ Pause
Step ⏩
⏪ Back
Speed:
1.0x
Time: 0.0s
Eff. WPH: 0.0
Steady WPH: 0.0
Completed: 0 / 100
Check Proc. Time
Stop
Start
End
Interval
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Timeline & Logs
NB Simulation | Ninebell
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IDR
BUF
PRa
PRb
PRc
SHTL
CHAM
LL
ALGN
VTRa
VTRb
ISRa
ISRb
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